Trek Model 1100TN Electrostatic Force Microscope (EFM)
Electrostatic Voltage Distribution Measurement System

  • Voltage Range:
  • Voltage Sensitivity:
  • Accuracy:
  • Incremental Step:
  • Detector Tip:
  • Measurement Area:
  • ±1 kV
    Better than 100 mV
    Better than 0.5% of full scale
    1 μm, minimum (detector)
    5 μm X 5 μm
  • 5 mm X 5 mm

The Trek Model 1100TN Electrostatic Force Microscope (EFM) enables voltage distribution measurements with a very high spatial resolution – better than 10μm – which is well beyond the capability of typical electrostatic voltmeters. Trek's EFM can also measure voltage distribution across a much larger surface area as compared to a scanning probe microscope when operated under atmospheric conditions. Trek's EFM employs a feedback voltage to the detector which is equal to the measured voltage thus preventing arcing between the detector and the surface under test.

  • Measurement of antistatic bags, Si wafer
  • Electrophotography material testing
  • Photovoltaic materials evaluation
  • MEMS testing
Features and Benefits
  • Can be used in atmosphere conditions
  • Spatial resolution is better than 10 μm
  • Three measurement modes:
    • - Static
      - Line Profile
      - 3D Mapping

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