Electrostatic Force Microscope Video

Data Sheet 

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Measurement Sample of the Antistatic Bag (500 μm X 500 μm)

• Voltage Range:
• Voltage Sensitivity:
• Accuracy:
• Incremental Step:
• Detector Tip:
• Measurement Area:

• ±1 kV
  Better than 100 mV
  Better than 0.5% of full scale
  1 μm, minimum (detector)
  5 μm X 5 μm
• 5 mm X 5 mm

The Trek Model 1100TN Electrostatic Force Microscope (EFM) enables voltage distribution measurements with a very high spatial resolution – better than 10μm – which is well beyond the capability of typical electrostatic voltmeters. Trek's EFM can also measure voltage distribution across a much larger surface area as compared to a scanning probe microscope when operated under atmospheric conditions. Trek's EFM employs a feedback voltage to the detector which is equal to the measured voltage thus preventing arcing between the detector and the surface under test.

Applications

• Measurement of antistatic bags, Si wafer
• Electrophotography material testing
• Photovoltaic materials evaluation
• MEMS testing

Features and Benefits

• Can be used in atmosphere conditions
• Spatial resolution is better than 10 μm
• Three measurement modes:
  • - Static
    - Line Profile
    - 3D Mapping