Products > Power Supplies > Electrostatic Chuck

Trek Model 640
Electrostatic Chuck Optimizer

  • Output Phasing:
  •      Voltage A:
  •      Voltage B:
  • Output Current Range:
       
  • Electrostatic Voltmeter Range:
  • Output Phasing:
  •      Resolution:
  •      Samples per second:
  •  
  • 0 to ±2 kV(4 kV p-to-p)
    0 to ±2 kV(4 kV p-to-p)
    0 to ±5 mA DC with a peak capability of 10 mA
  • 0 to ±2 kV DC or peak AC
  •  
    16 bit
  • 250k

Trek’s Model 640 Electrostatic Chuck Optimizer system is a diagnostic tool which enables evaluation and optimization of waveforms/voltages for electrostatic chucks/clamps in order to minimize de-clamp time, maximize clamp force, and achieve optimum wafer processing for ESC systems.

Model 640 combines two amplifiers (for two-phase voltage combinations) and a waveform generator, which can be independently programmed and configured to investigate, research, and discover the perfect power supply and waveform recipe to efficiently drive an ESC application. An electrostatic voltmeter (ESVM) is included to monitor residual voltage from the clamping/de-clamping process.

Typical Applications Include
  • Electrostatic-driven handling of materials
  • Semiconductor wafer processing
  • Non-mechanical transfer of flat panels or other processing materials sensitive to mechanical handling
Features and Benefits
  • Enables the creation of customized waveforms to be simple yet powerful, to generate the most complex waveforms that can be envisioned by the user
  • The product’s software accepts parameters via arbitrary data input, pre-programmed waveforms, or user generated CSV files
  • Accommodates one-phase or two-phase ESC systems
  • Research is enhanced via three individually programmed stages to build the output waveform: (1) Clamp Signal Stage, (2) Processing Signal Stage (with options to “loop” the process cycle), and (3) De-clamp Stage
  • Test data is recorded and presented in numerical and graphical format with a color coded display
  • The graphs can also be used to troubleshoot mechanical and electrical problems within an ESC operation
  • Custom-OEM ESC supplies can be designed and manufactured by Trek to incorporate the desired waveform recipe resulting from customer evaluations
  • NIST-traceable Certificate of Calibration provided with each unit

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